The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. Nature 568, 373377 (2019). Full Text electro optic modulator 10.1109/LPT.2021.3056913. Internet Explorer). Compact MZI modulators on thin film Z-cut lithium niobate The demonstrated bit rate is currently limited by our PRBS generator (Agilent 70843B) which has a maximum bit rate of 12Gbs1. and JavaScript. ADS 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. High-quality lithium niobate photonic crystal nanocavities. Li, M., Liang, H., Luo, R., He, Y. 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. Nature 435, 325327 (2005). Product Overview. The resist residue was removed by a further O+ plasma etching. Dong, P. et al. Sun, C. et al. Express 19, 75307536 (2011). Express 26, 220232 (2018). Rao, A. et al. Aoki, M. et al. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. B. Attojoule optoelectronics for low-energy information processing and communications. Thank you for visiting nature.com. The orange curve in Fig. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge.